Clean room is a special designed room to exclude the particles in the air, bacteria and other harmful air pollutants, and the indoor temperature, cleanliness, interior pressure, air velocity and air distribution, noise, vibration, and lighting, static control within the scope of a certain demand.

The main function of clean room is to control the cleanliness and temperature & humidity of the atmosphere that products (such as silicon) contact, can make the products in a good environment of production and manufacturing. Dust-free purification level mainly be decided according to the number of air particle diameter per cubic meter is greater than the standard number of particles.